Fast source optimization involving quadratic line-contour objectives for the resist image
نویسندگان
چکیده
منابع مشابه
Fast source optimization involving quadratic line-contour objectives for the resist image.
In Abbe's formulation, source optimization (SO) is often formulated into a linear or quadratic problem, depending on the choice of objective functions. However, the conventional approach for the resist image, involving a sigmoid transformation of the aerial image, results in an objective with a functional form. The applicability of the resist-image objective to SO or simultaneous source and mas...
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ژورنال
عنوان ژورنال: Optics Express
سال: 2012
ISSN: 1094-4087
DOI: 10.1364/oe.20.008161